Detection system

information

GAS Detector

Thermo TS analyzer

Partical Detector

Through the clean room Partical control regulations, ISO14644-1, ISO21501-4, dust or particle foreign matter will cause production quality doubts, whether it is the produced during the manufacturing process or external pollution sources. we provides different detection instruments or sensors for air/vacuum and liquid, airborne particle sensor/ Liquid particle sensor/ inline particle sensor.

Representative product: Nordson(CyberOptics) Wafersense APS/ IPS

ESD / Resistance detector

WaferSense® Auto Vibration and Leveling Sensor™ (AVLS3)

WaferSense® Auto Multi Sensor™ (AMS)

WaferSense® Auto Gapping System 2™ (AGS2)

WaferSense® Auto Teaching System™ (ATS2)

WaferSense® Auto Resistance Sensor™ (ARS)