WaferSense® Airborne Particle Sensor™ (APS3)

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WaferSense® Airborne Particle Sensor™ (APS3)

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Wafer-shaped

Available in 150mm, 200mm, and 300mm wafer sizes.

Wireless

Transmits particle data to your laptop or PC in real-time.

Measures particles greater than .14 microns

Reports particles in 0.1μm and 0.5μm bin sizes and larger particles in 2, 5, 10 and 30 μm bin sizes.

Easy-to-use software

CyberSpectrum™ application software provides the user with real time visual feedback and can record and replay logged data for review and analysis.

  • Factory interface FI/EFEM
  • Photo Lithography
  • Di_usion/Furnace
  • Test and Inspection
  • Rapid Thermal Anneal; RTA, RTP
  • Metrology
  • Microcontamination
  • Auto Handling System; AMHS and Stockers
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