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Partical Detector
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Partical Detector
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Through the clean room Partical control regulations, ISO14644-1, ISO21501-4, dust or particle foreign matter will cause production quality doubts, whether it is the produced during the manufacturing process or external pollution sources. we provides different detection instruments or sensors for air/vacuum and liquid, airborne particle sensor/ Liquid particle sensor/ inline particle sensor.
Representative product: Nordson(CyberOptics) Wafersense APS/ IPS
Airborne Particle Sensor (APS)
APS system, capable of detecting particles as small as 0.15 micrometers, is designed in a quasi-wafer shape. It can measure the number of micro-dust particles in the gas inside the equipment chamber in real-time without opening the machine. Additionally, it can be applied to monitor micro-dust contamination in the Automated Material Handling System (AMHS). This allows you to identify the source of micro-dust contamination promptly, reducing the maintenance time for equipment on the production line. The product is available in 8 -inch and 12-inch specifications.
In-line Particle Sensor™ (IPS™)
Collect and display particle data using IPS and new CyberSpectrum™ software for real-time equipment diagnostics.
Compare past and present data as well as one tool to another easier and faster with CyberSpectrum. See the effect of cleanings, adjustments and repairs in real time.
Save time by swiftly locating contamination sources.
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