WaferSense® Auto Gapping System 2™ (AGS2)

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WaferSense® Auto Gapping System 2™ (AGS2)

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Preliminary Specifications
Form factorAvailable in 200mm and 300mm
SoftwareNordson Spectrum
Accuracy± 0.025 mm for gaps up to 30mm
Housing materialCarbon Fiber
Resolution<0.001 mm (for <30 mm gap)
Range8 to 30mm (Standard), 7 to 50mm (Extended - exploratory)
Weight250 g (300mm)
Operating pressure<10⁻⁶ to 760 torr
Temperature20 to 60 ℃
Battery-duration<3 hrs. per charge
CommunicationBluetooth
Operating systemWindows 10
Product componentsGapping measurement device, charging clean case, carrying suitcase, USB communications link module and application software
CalibrationFactory recalibration recommended annually
  • Chemical vapor deposition; CVD, ALD
  • Atomic layer deposition; ALD
  • Wet (chemical) etch, plasma etch
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