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WaferSense® Auto Vibration and Leveling Sensor™ (AVLS3)
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WaferSense® Auto Vibration and Leveling Sensor™ (AVLS3)
point
Wireless, wafer-shaped and battery-powered | Available in 300mm. AVLS3 and AVLS3H versions. |
Reports Accelerations in three dimensions | x, y and z |
Reports inclination in two dimensions | x, and y |
Thin | 3.5mm, laminated chemically hardened glass substrate. |
- Epitaxy
- Thermal oxidation/metallization
- Plasma vapor deposition; PVD
- Chemical vapor deposition; CVD, ALD
- CMP
- Atomic layer deposition; ALD
- Photo lithography
- Wet (chemical) etch, plasma etch
- Dry etch
- Ion implant
- Di_usion/furnace
- Rapid thermal anneal; RTA, RTP
- Test and inspection
- Metrology
- Micro contamination
- Auto handling system; AMHS
- Module repair
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Through the clean room Partical control regulations, ISO14644-1, ISO21501-4, dust or particle foreign matter will cause production quality doubts, whether it is the produced during the manufacturing process or external pollution sources. we provides different detection instruments or sensors for air/vacuum and liquid, airborne particle sensor/ Liquid particle sensor/ inline particle sensor.
Representative product: Nordson(CyberOptics) Wafersense APS/ IPS
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