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WaferSense® Auto Resistance Sensor™ (ARS)
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WaferSense® Auto Resistance Sensor™ (ARS)
point
Wireless, Wafer-Shaped | Available in 300mm |
Durable Housing | Edge contacts are mechanically robust with noble metal plating 50 Measurement Pads Chemically compatible with SABRE chemistry and cleaning procedures |
Highly Accurate | 1mΩ ±1% of range with normalized readings Resolution of 100μΩ |
Lightweight and Thin | 270 grams and 5.5mm thick |
- Electrochemical Deposition; ECD
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