總是想在你的前面
Always Thinking In Advance For You
WaferSense® Auto Multi Sensor™ (AMS)
information
WaferSense® Auto Multi Sensor™ (AMS)
point
Wireless, wafer-shaped and battery-powered | Available in 150mm, 200mm, 300mm. Thin, 4.5mm thick |
Reports Accelerations in three dimensions | x, y and z |
Reports Inclination in three dimensions | x, y and vertical |
Humidity Accuracy | +/- 2% RH |
- Epitaxy
- Thermal oxidation/metallization
- Plasma vapor deposition; PVD
- Chemical vapor deposition; CVD, ALD
- CMP
- Atomic layer deposition; ALD
- Photo lithography
- Wet (chemical) etch, plasma etch
- Dry etch
- Ion implant
- Di_usion/furnace
- Rapid thermal anneal; RTA, RTP
- Test and inspection
- Metrology
- Micro contamination
- Auto handling system; AMHS
- Module repair
related products
ESD / Resistance detector
Partical Detector
Through the clean room Partical control regulations, ISO14644-1, ISO21501-4, dust or particle foreign matter will cause production quality doubts, whether it is the produced during the manufacturing process or external pollution sources. we provides different detection instruments or sensors for air/vacuum and liquid, airborne particle sensor/ Liquid particle sensor/ inline particle sensor.
Representative product: Nordson(CyberOptics) Wafersense APS/ IPS
WaferSense® Auto Vibration and Leveling Sensor™ (AVLS3)
WaferSense® Auto Teaching System™ (ATS2)
WaferSense® Auto Resistance Sensor™ (ARS)