WaferSense® Auto Multi Sensor™ (AMS)

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WaferSense® Auto Multi Sensor™ (AMS)

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Wireless, wafer-shaped and battery-powered

Available in 150mm, 200mm, 300mm.

Thin, 4.5mm thick

Reports Accelerations in three dimensions

x, y and z

Reports Inclination in three dimensions

x, y and vertical

Humidity Accuracy

+/- 2% RH

 

 

 

  • Epitaxy
  • Thermal oxidation/metallization
  • Plasma vapor deposition; PVD
  • Chemical vapor deposition; CVD, ALD
  • CMP
  • Atomic layer deposition; ALD
  • Photo lithography
  • Wet (chemical) etch, plasma etch
  • Dry etch
  • Ion implant
  • Di_usion/furnace
  • Rapid thermal anneal; RTA, RTP
  • Test and inspection
  • Metrology
  • Micro contamination
  • Auto handling system; AMHS
  • Module repair
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